Design considerations for the AC/DC C-MAG® deposition source and power supply system
- 30 August 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 351 (1-2) , 21-26
- https://doi.org/10.1016/s0040-6090(99)00150-9
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Reactive sputtering and the use of anodes for optical coatingsJournal of Non-Crystalline Solids, 1997
- The use of ac power on cylindrical magnetronsJournal of Non-Crystalline Solids, 1997