Development of chemical sensors using microfabrication and micromachining techniques
- 15 November 1995
- journal article
- review article
- Published by Elsevier in Materials Chemistry and Physics
- Vol. 42 (2) , 87-90
- https://doi.org/10.1016/0254-0584(95)01550-7
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Development of chemical sensors using microfabrication and micromachining techniquesSensors and Actuators B: Chemical, 1993
- Semiconducting gas sensor incorporating a sparking decomposerSensors and Actuators B: Chemical, 1990
- A hydrogen-sensitive Pd-gate MOS transistorJournal of Applied Physics, 1975
- A New Detector for Gaseous Components Using Semiconductive Thin Films.Analytical Chemistry, 1962