Correlations between sputtering parameters, composition and resistivity of granular NbN films
- 1 February 1990
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 185 (1) , 145-158
- https://doi.org/10.1016/0040-6090(90)90014-5
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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