Flash evaporation of TiNi shape memory thin film for microactuators
- 23 December 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 71 (3) , 187-192
- https://doi.org/10.1016/s0924-4247(98)00180-0
Abstract
No abstract availableKeywords
Funding Information
- Ministry of Education, Culture, Sports, Science and Technology (06650294)
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