Plasma polymerization of hexamethyldisiloxane in the gas phase. I. Polymerization studies

Publisher Website
Google Scholar
Abstract
Hexamethyldisiloxane (HMDS) was r.f. plasma polymerized (PP) in the gas phase by use of a tubular reactor with inner electrodes, at 13.56 MHz. The film obtained under all conditions tested was highly crosslinked and did not oxidize in air after aging. Time dependence of p.p. HMDS deposition, overall deposition rate as a function of monomer flow rate at different power levels, as well as interrelation between deposition rate, monomer flow rate and r.f. power were examined and results are discussed. Infrared spectra of the products obtained at different conditions were similar, excepting for the differences due to crosslink densities and background absorptions.