Thin layers composition and impurities determination using low energy proton X-ray excitation: Applications to chalcogenide films stoichiometry and boron purification control
- 15 May 1974
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 117 (2) , 579-587
- https://doi.org/10.1016/0029-554x(74)90308-5
Abstract
No abstract availableKeywords
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