Carrier spilling revisited: On-bevel junction behavior of different electrical depth profiling techniques
- 1 March 2003
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 21 (2) , 729-736
- https://doi.org/10.1116/1.1547723
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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