A novel micromachined pump based on thick-film piezoelectric actuation
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A novel micropump design with thick-film piezoelectric actuationMeasurement Science and Technology, 1997
- A study of the effects of process variables on the properties of PZT films produced by a single-layer sol-gel techniqueJournal of Materials Science, 1995
- In-situ deposition of PZT thin films by RF magnetron sputteringIntegrated Ferroelectrics, 1995
- SensorenPublished by Springer Nature ,1992
- A piezoelectric micropump based on micromachining of siliconSensors and Actuators, 1988