Single heterostructure AlxGa1−xAs phase modulator with SnO2-doped In2O3 cladding layer

Abstract
Sputter deposition of low‐resistivity (0.02 Ω cm) layers of SnO2‐doped In2O3 onto AlxGa1−xAs results in heterojunction barriers to either n‐ or p‐type material. Low‐loss AlxGa1−xAs waveguides with SnO2‐In2O3 cladding have been fabricated. Their propagation properties can be efficiently modulated by means of the linear electro‐optic effect. Phase shifts for TE modes of 160 deg/V cm were measured at a wavelength λ=0.9 μm.