Surface quality of {111} side-walls in KOH-etched cavities
- 31 May 1997
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 60 (1-3) , 244-248
- https://doi.org/10.1016/s0924-4247(97)01495-7
Abstract
No abstract availableKeywords
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