Applications of a system for real‐time imaging of analyzed areas in surface analysis

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Abstract
A real‐time imaging system has been used to determine the analyzer acceptance area in electron spectrometers used for surface analysis. This inexpensive system uses an electron beam that is rastered across the specimen to create both specimen images and images of analyzed areas. These two images can then be superimposed on a video monitor or black and white television set for real‐time display at TV rates. The imaging system has been used to examine the properties of a double‐pass cylindrical mirror analyzer (Perkin–Elmer Model PHI‐550) and a hemispherical analyzer (KRATOS ES300). For the double‐pass CMA, the analyzed area was star‐shaped rather than the expected circular shape and in the retarding mode the analyzer pass energy had only a small effect on the size of the analyzed area; also, the minimum analyzed area did not coincide with the focal point of the analyzer as determined by an elastically back‐scattered 2 keV electron beam. For the hemispherical analyzer, the analyzed area was found to depend almost entirely on the size of the entrance slit, was slightly affected by the initial kinetic energy of the imaged electrons and the mode of operation, but was not affected by the analyzer pass energy or the size of the exit slit.