Electronic superposition of sample current and secondary-electron images in Auger electron spectroscopy

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Abstract
Selected‐area analysis by Auger electron spectroscopy requires a knowledge of electron‐beam location and the ability to place the beam on specified areas quickly and reproducibly. For samples with both conducting and insulating regions, it is highly desirable to use a grazing‐angle‐of‐incidence electron beam to reduce surface‐charging effects. Unfortunately, the use of grazing incidence makes the location of the area of interest and simultaneous optimization of the Auger signal rather difficult because of a parallax problem. Superposition of sample current images and secondary‐electron images produced by scanning the electron beam from the grazing‐incidence gun provides a solution to these alignment problems.