Surface micromachined diamond microswitch
- 31 May 2000
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 9 (3-6) , 970-974
- https://doi.org/10.1016/s0925-9635(99)00292-7
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Surface-micromachined electrostatic microrelaySensors and Actuators A: Physical, 1998
- Electrostatically actuated micromechanical switchesJournal of Vacuum Science & Technology A, 1997
- High temperature Young's modulus of polycrystalline diamondDiamond and Related Materials, 1997
- Design, fabrication, and characterization of electrostatic microrelaysPublished by SPIE-Intl Soc Optical Eng ,1995