New High Current Low Energy Ion Source
- 1 March 1986
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 25 (3A) , L252
- https://doi.org/10.1143/jjap.25.l252
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Discharge and ion extraction properties of a beam-plasma ion sourceJournal of Applied Physics, 1985
- Energy dependence of the ion-induced sputtering yields of monatomic solidsAtomic Data and Nuclear Data Tables, 1984
- CW Ar+ Laser Pumped by an Intense Electron BeamJapanese Journal of Applied Physics, 1983