Sudden surface roughening followed by levelling observed in SIMS analysis of InP‐containing III–V multilayers
- 1 July 1993
- journal article
- Published by Wiley in Surface and Interface Analysis
- Vol. 20 (8) , 742-744
- https://doi.org/10.1002/sia.740200819
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Composition and structure of ion‐bombardment‐induced growth cones on InPSurface and Interface Analysis, 1991
- Radiation‐induced sample modification in surface analysis: InP as an extreme exampleSurface and Interface Analysis, 1989
- Synergetic effects during sputter-assisted depth profiling: Growth-dominated topography development on InP and a model of the atomic mechanismMicrochimica Acta, 1987
- Erosion and Growth of Solids Stimulated by Atom and Ion BeamsPublished by Springer Nature ,1986
- Sputtering by Particle Bombardment IITopics in Applied Physics, 1983
- Introduction and overviewPublished by Springer Nature ,1983
- The topography of sputtered semiconductorsRadiation Effects, 1973