Synergetic effects during sputter-assisted depth profiling: Growth-dominated topography development on InP and a model of the atomic mechanism
- 1 January 1987
- journal article
- research article
- Published by Springer Nature in Microchimica Acta
- Vol. 91 (1-6) , 169-177
- https://doi.org/10.1007/bf01199493
Abstract
No abstract availableKeywords
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