2-D analytic model for inductively coupled plasma sources. II. Effects of 2-D coupled damping and their applications
- 1 January 1995
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Plasma Science
- Vol. 23 (1) , 74-82
- https://doi.org/10.1109/27.376563
Abstract
For pt.I see ibid., vol.23, no.1, p.65-73 (1995). In part I, we developed the electromagnetic model and analyzed the plasma kinetic behavior for the recently developed inductively coupled plasma sources (ICPS). The analytic forms demonstrated that the induced RF wave in ICPS is primarily dampened by a collisionless dissipation mechanism, In this paper, the 2-D coupled damping effect is further discussed. A criterion is given to describe the magnitude of coupled damping relative to collisions. The numerical integrals show that the coupled damping is obvious only as the RF phase velocity is close to plasma thermovelocity. The electron velocity distribution function was calculated for different cases, Also analyzed were the geometry and frequency effects. It was found that appropriately adjusting the reactor height and coil current frequency could strengthen the coupled damping effect so as to benefit extracting the energy from the induced RF wave to the plasmas.Keywords
This publication has 8 references indexed in Scilit:
- Plasma uniformity in high-density inductively coupled plasma toolsPlasma Sources Science and Technology, 1995
- Collisionless electron heating in an inductively coupled dischargePhysical Review Letters, 1993
- Two-dimensional hybrid model of inductively coupled plasma sources for etchingApplied Physics Letters, 1993
- Electron energy distribution function measurements in a planar inductive oxygen radio frequency glow dischargeApplied Physics Letters, 1993
- Optical ion energy measurements in a radio-frequency-induction plasma sourceJournal of Applied Physics, 1993
- Plasma ionization by helicon wavesPlasma Physics and Controlled Fusion, 1991
- Modeling inductively coupled plasmas: The coil current boundary conditionJournal of Applied Physics, 1991
- Introduction to Plasma Physics and Controlled FusionPublished by Springer Nature ,1984