Preparation of highly photosensitive hydrogenated amorphous Si-Ge alloys using a triode plasma reactor

Abstract
Highly photoconductive hydrogenated amorphous Si‐Ge alloys have been prepared from a SiH4/GeH4 gas mixture using a triode glow‐discharge reactor. High photoconductivity (Δσp≂104 Ω1 cm1) under the AM1 (100 mW/cm2) illumination and low dark conductivity (σd=108–109 Ω1 cm1) have been obtained for the optical gap in the range between 1.5 and 1.7 eV.