Electron kinetics in a collision-dominated SiH4 rf plasma including self-consistent rf field strength calculation
- 1 September 1990
- journal article
- research article
- Published by Springer Nature in Plasma Chemistry and Plasma Processing
- Vol. 10 (3) , 419-442
- https://doi.org/10.1007/bf01447201
Abstract
No abstract availableKeywords
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