The influence of the electron transport cross sectional shape on electron energy distribution functions in DC and microwave plasmas

Publisher Website
Google Scholar
Abstract
A numerical solution of a system of equations describing DC and microwave diffusion-controlled discharge plasmas has been carried out. It is shown that a knowledge of the energy dependence of the electron momentum transfer cross section makes it possible to predict a priori the dissimilarities in the electron distribution functions in the two types of discharge: differences in electron mean energies in the case of equal power consumptions in inert gas plasmas; information on differences in electron distribution function 'tails' in the case of equal electron mean energies in inert gas plasmas and in the case of equal power consumptions in molecular plasmas.