Design and Fabrication of Monolithically Integrated Lateral-Electrode Etched-Mirror Laser with Y-Branch Single-Mode Waveguide in GaAs/AlGaAs

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Abstract
Design and fabrication of a monolithically integrated lateral-electrode laser with a Y-branch single-mode waveguide are described. The ridge-guided Fabry-Perot laser and strip-loaded waveguide are coupled with the evanescent field, and are fabricated simply without resorting to complicated regrowth procedures. The laser has planar lateral electrodes with a dry-etched cavity. Furthermore, the waveguide is of the strip-loaded type, consisting of two cladding layers having different carrier concentrations to reduce the impurity absorption. The growth structure is optimized theoretically, and the coupled beams from the waveguide are observed experimentally.