Fabrication and measurement of a Nb based superconducting single electron transistor
- 1 August 1994
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 65 (5) , 636-638
- https://doi.org/10.1063/1.112255
Abstract
A new four-layer resist system was developed to fabricate small capacitance niobium tunnel junctions. Nb/AlOx/Al junctions were used to make a superconducting single electron transistor composed of two dc SQUIDs in series. The current-voltage characteristics were measured and two types of resonant tunneling of Cooper pairs were observed at different magnetic fields.Keywords
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