Transient Auger analysis of silicon nitride
- 31 December 1985
- journal article
- Published by Elsevier in Spectrochimica Acta Part B: Atomic Spectroscopy
- Vol. 40 (5-6) , 865-870
- https://doi.org/10.1016/0584-8547(85)80140-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Dynamic surface composition changes in binary alloys under ion bombardmentNuclear Instruments and Methods, 1981
- Distortion of depth profiles during sputteringNuclear Instruments and Methods, 1980
- Recoil implantation and ion-beam-induced composition changes in alloys and compoundsJournal of Applied Physics, 1979