Contrast in the evanescent near field of λ/20 period gratings for photolithography
- 1 January 2000
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 39 (1) , 20-25
- https://doi.org/10.1364/ao.39.000020
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.Keywords
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