ChemInform Abstract: THERMODYNAMIC AND EXPERIMENTAL ANALYSIS OF CHEMICAL VAPOR DEPOSITION OF ALUMINA FROM ALUMINUM CHLORIDE-HYDROGEN-CARBON DIOXIDE GAS PHASE MIXTURES
- 28 September 1982
- journal article
- abstracts
- Published by Wiley in Chemischer Informationsdienst
- Vol. 13 (39)
- https://doi.org/10.1002/chin.198239021
Abstract
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This publication has 1 reference indexed in Scilit:
- Thermodynamic and Experimental Analysis of Chemical Vapor Deposition of Alumina from AlCl3 ‐ H 2 ‐ CO 2 Gas Phase MixturesJournal of the Electrochemical Society, 1982