Investigation of the solvent‐evaporation effect on spin coating of thin films
- 1 May 1983
- journal article
- research article
- Published by Wiley in Polymer Engineering & Science
- Vol. 23 (7) , 399-403
- https://doi.org/10.1002/pen.760230706
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- An investigation of spin coating of electron resistsPolymer Engineering & Science, 1979
- Characteristics of resist films produced by spinningJournal of Applied Physics, 1978
- Rheology and Modeling of the Spin Coating ProcessIBM Journal of Research and Development, 1977