Production results of X-band GaAs MMIC 5-bit phase shifters

Abstract
The measured results of the production of high-performance, highly reproducible, small-size (96 mils*48 mils) GaAs monolithic 5-b phase shifters for phased array system applications are presented. Very good DC ( >90%) and RF (75%-80%) yields have been achieved on an X-band phase shifter. The performance correlation of these phase shifters between wafer-level results and assembled-module-level data has been verified.<>

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