Nonlinearity and hysteresis of resonant strain gauges
- 1 March 1998
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 7 (1) , 122-127
- https://doi.org/10.1109/84.661394
Abstract
The nonlinearity and hysteresis effects of the electrostatically activated voltage-driven resonant microbridges have been studied theoretically and experimentally. It is shown that in order to avoid vibration instability and hysteresis to occur, the choices of the ac and dc driving voltages and of the quality factor of a resonator, with a given geometry and choice of materials, are limited by a hysteresis criterion. The limiting conditions are also formulated as the hysteresis-free design rules. Expressions for the maximum allowable quality factor and maximum attainable figure of merit are given. Experimental results, as obtained from electrostatically driven vacuum-encapsulated low-pressure chemical-vapor deposition (LPCVD) polysilicon microbridges, are presented and show good agreement with the theoryKeywords
This publication has 9 references indexed in Scilit:
- Resonant microbeam strain transducersPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micromechanical structures for thin film characterizationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysiliconPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1997
- Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressureJournal of Micromechanics and Microengineering, 1995
- Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabricationSensors and Actuators A: Physical, 1994
- Electrostatically driven vacuum-encapsulated polysilicon resonatorsSensors and Actuators A: Physical, 1994
- Micro resonant force gaugesSensors and Actuators A: Physical, 1992
- Nonlinear vibrations and hysteresis of micromachined silicon resonators designed as frequency-out sensorsElectronics Letters, 1987
- Nonlinear vibration of beams and rectangular platesZeitschrift für angewandte Mathematik und Physik, 1964