Ion beam modification for submicron technology
- 1 June 1996
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 113 (1-4) , 154-160
- https://doi.org/10.1016/0168-583x(95)01321-0
Abstract
No abstract availableThis publication has 24 references indexed in Scilit:
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