Quantitative analysis of impurities in suicide layers with SIMS
- 1 January 1987
- journal article
- Published by Springer Nature in Analytical and Bioanalytical Chemistry
- Vol. 329 (2-3) , 220-224
- https://doi.org/10.1007/bf00469144
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Refractory silicides for integrated circuitsJournal of Vacuum Science and Technology, 1980