Resolution criteria in scanning microscopes

Abstract
The physical nature of the sample-illuminating wave (coherent or incoherent and focused or plane) and of the detector (phase or intensity sensitive) must be accounted for in the definition of a resolution criterion for a scanning microscope. The purpose of this paper is to study the resolution criterion for coherent scanning acoustical and optical microscopes, owing to the properties of the available detectors for each kind of radiation. The theoretical results are well supported by the experimental findings for the scanning acoustic microscope.

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