Image resolution of the scanning acoustic microscope
- 15 December 1977
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 31 (12) , 793-796
- https://doi.org/10.1063/1.89552
Abstract
We have measured the spatial frequency response of an experimental scanning acoustic microscope (SAM) at 375 MHz, using an acoustic high-resolution reflection test target consisting of Au bars on a silicon substrate. Although the instrument resolves 1.6-μm line detail quite well, in favorable agreement with theoretical predictions, the shape of the spatial frequency response curve differs substantially from expectations.This publication has 4 references indexed in Scilit:
- Phase imaging with the scanning acoustic microscopeElectronics Letters, 1976
- Acoustic properties of sputtered glass at microwave frequenciesApplied Physics Letters, 1976
- Integrated circuits as viewed with an acoustic microscopeApplied Physics Letters, 1974
- The Specification of Imaging Properties by Response to a Sine Wave InputJournal of the Optical Society of America, 1954