Materials reliability in MEMS devices
- 22 November 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 591-593
- https://doi.org/10.1109/sensor.1997.613720
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
- Reliability and long term stability of MEMSPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Micromechanical fatigue testingExperimental Mechanics, 1993
- Long-Term Stability of Nickel in Resonant Micro-Mechanical DevicesMRS Proceedings, 1993
- Slow Crack Growth in Single-Crystal SiliconScience, 1992
- Subcritical Crack Growth in CeramicsPublished by Springer Nature ,1974