CW operation of monolithic arrays of surface-emitting AlGaAs diode lasers with dry-etched vertical facets and parabolic deflecting mirrors
- 1 October 1993
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 5 (10) , 1146-1149
- https://doi.org/10.1109/68.248409
Abstract
A monolithic two-dimensional array of surface-emitting AlGaAs diode lasers with dry-etched vertical facets and parabolic deflecting mirrors was mounted junction-side up on a W/Cu microchannel heatsink and evaluated under continuous-wave (CW) operating conditions. Both the facets and parabolic deflecting mirrors were etched using chlorine ion-beam-assisted etching. Threshold current densities of different sections of the array were consistently around 240 A/cm/sup 2/, and measured CW differential quantum efficiencies were in the 46-48% range. CW power densities as high as 148 W/cm/sup 2/ were achieved with an average temperature rise of less than 25 degrees C in this junction-side-up configuration.<>Keywords
This publication has 18 references indexed in Scilit:
- High quantum efficiency monolithic arrays of surface-emitting AlGaAs diode lasers with dry-etched vertical facets and parabolic deflecting mirrorsApplied Physics Letters, 1992
- Microchannel heat sink with alternating directions of water flow in adjacent channels (Invited Paper)Published by SPIE-Intl Soc Optical Eng ,1992
- High power cw operation of GaAs/GaAlAs surface-emitting lasers mounted in the junction-up configurationApplied Physics Letters, 1991
- Beam properties of AlGaAs power lasers with high-quality etched mirrorsIEEE Photonics Technology Letters, 1991
- High performance surface-emitting lasers with 45° intracavity micromirrorsApplied Physics Letters, 1991
- High efficiency, high uniformity, grating coupled surface emitting lasersElectronics Letters, 1990
- Microchannel heat sinks for two-dimensional high-power-density diode laser arraysIEEE Journal of Quantum Electronics, 1989
- Coherent, monolithic two-dimensional (10×10) laser arrays using grating surface emissionApplied Physics Letters, 1988
- Monolithic two-dimensional surface-emitting arrays of GaAs/AlGaAs diode lasersApplied Physics Letters, 1987
- Surface-emitting GaAlAs/GaAs linear laser arrays with etched mirrorsApplied Physics Letters, 1986