TEM Observation of Microstructure in Sputtered Co-Cr Film
- 1 December 1985
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 24 (12A) , L951
- https://doi.org/10.1143/jjap.24.l951
Abstract
TEM observation of the microstructure in a sputtered Co-18.1 at%Cr film with perpendicular magnetic anisotropy was conducted. The TEM thin foil samples were prepared by dipping them in hydrazine monohydrate solution and milling them with ion beams. It was found that the microstructure of each crystallite showed bright stripe-like features in fairly regular directional patterns, which seemed to reflect compositional inhomogeneity.Keywords
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