Emissionspectroscopic Investigation of Bci3 Discharges
- 1 January 1990
- journal article
- research article
- Published by Wiley in Contributions to Plasma Physics
- Vol. 30 (5) , 691-701
- https://doi.org/10.1002/ctpp.2150300514
Abstract
No abstract availableKeywords
This publication has 7 references indexed in Scilit:
- Reactive ion etching of GaAs and AlGaAs in a BCl3–Ar dischargeJournal of Vacuum Science & Technology B, 1989
- Nonlinear excitation and dissociation kinetics in discharges through mixtures of rare and attaching gasesJournal of Applied Physics, 1988
- Absolute photo-emission cross section of the BClA 1? ?X 1?+ system produced by dissociative electron impact on BCl3The European Physical Journal D, 1988
- Optical emission spectroscopy and actinometry in CCl4-Cl2 radiofrequency dischargesPlasma Chemistry and Plasma Processing, 1984
- Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle densityJournal of Applied Physics, 1980
- Absorption spectrum of BS2 at 4°KJournal of Molecular Spectroscopy, 1973
- Absolute Transition Probabilities in Ultraviolet Molecular SpectraThe Journal of Chemical Physics, 1968