Plasma deposition of (Ti,Al)N coatings at various magnetron discharge power levels
- 1 October 1991
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 48 (1) , 25-30
- https://doi.org/10.1016/0257-8972(91)90125-g
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Wear resistance of plasma-nitrided and sputter-ion-plated hobsSurface and Coatings Technology, 1990
- Comparative tests of TiN and (Ti0.5,Al0.5)N coated hobs in gear cutting operationsVacuum, 1989
- Titanium aluminum nitride films: A new alternative to TiN coatingsJournal of Vacuum Science & Technology A, 1986
- A high rate sputtering process for the formation of hard friction-reducing TiN coatings on toolsThin Solid Films, 1982