Transmission loss characteristics of silicon nitride waveguides fabricated by liquid source plasma enhanced chemical vapor deposition
- 26 February 2007
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 515 (7-8) , 3816-3819
- https://doi.org/10.1016/j.tsf.2006.10.008
Abstract
No abstract availableKeywords
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