Application of high-power ion beams for technology
- 9 March 1993
- journal article
- research article
- Published by Cambridge University Press (CUP) in Laser and Particle Beams
- Vol. 11 (4) , 707-731
- https://doi.org/10.1017/s0263034600006467
Abstract
Industrial applications of high-power ion beams, basically in the field of material engineering, are presented. The results of experimental investigations of some kinds of applications, such as ion implantation, metal modification, and compounds production of thin films, are considered.Keywords
This publication has 19 references indexed in Scilit:
- High-power ion-beam-induced melting and mixing in deposited structuresMaterials Science and Engineering: A, 1989
- Industrial applications of pulse power and particle beamsLaser and Particle Beams, 1989
- Comparative status of pulsed ion implantationNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Development of an intense pulsed metallic ion beam sourceIEEE Transactions on Plasma Science, 1988
- Ion induced metastable phasesNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987
- Structure modifications and mechanical properties of alloys exposed to pulsed ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Structure of near surface layers of GaAs and Si crystals irradiated by powerful ion beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986
- Implantation with ion pulsesPhysica Status Solidi (a), 1986
- Pulse ion implantation - new single step doping techniquePhysica Status Solidi (a), 1981
- Pulsed Ion Beam Annealing Of Nickel Thin Films on SiliconMRS Proceedings, 1981