Scaling capability improvement of silicon-on-void (SOV) MOSFET
- 21 December 2004
- journal article
- Published by IOP Publishing in Semiconductor Science and Technology
- Vol. 20 (2) , 115-119
- https://doi.org/10.1088/0268-1242/20/2/002
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Silicon-on-Nothing MOSFETs: Performance, Short-Channel Effects, and Backgate CouplingIEEE Transactions on Electron Devices, 2004
- Silicon-on-Nothing (SON)-an innovative process for advanced CMOSIEEE Transactions on Electron Devices, 2000
- Analytical threshold voltage model for ultrathin SOI MOSFETs including short-channel and floating-body effectsIEEE Transactions on Electron Devices, 1999
- Buried Layer Engineering to Reduce the Drain-Induced Barrier Lowering of Sub-0.05 µm SOI-MOSFETJapanese Journal of Applied Physics, 1999