Control of hot-filament ionization gauge emission current: mathematical model and model-based controller
- 1 July 1997
- journal article
- Published by IOP Publishing in Measurement Science and Technology
- Vol. 8 (7) , 798-803
- https://doi.org/10.1088/0957-0233/8/7/016
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Electron beam evaporation with hot filament and magnetic field—Computer control and parameter estimationVacuum, 1994
- Glühkathoden‐Ionisationsmanometer für hohe Drücke im VakuumbereichVakuum in Forschung und Praxis, 1991
- The calibration of vacuum gaugesJournal of Physics E: Scientific Instruments, 1977
- A precision electron emission regulatorVacuum, 1972
- Automatic Thin Film Vacuum Deposition System of High StabilityReview of Scientific Instruments, 1964
- Method of Measuring and Controlling Evaporation Rates during the Production of Thin Films in VacuumReview of Scientific Instruments, 1961