Hydrogen content and optical properties of LPCVD amorphous silicon films
- 1 December 1985
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 77-78, 575-578
- https://doi.org/10.1016/0022-3093(85)90726-4
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Hydrogenated Amorphous Silicon Produced by Pyrolysis of Disilane in a Hot Wall ReactorJapanese Journal of Applied Physics, 1984