The production of repetitive surface features by oblique incidence ion bombardment
- 1 August 1993
- journal article
- Published by Taylor & Francis in Philosophical Magazine Part B
- Vol. 68 (2) , 231-236
- https://doi.org/10.1080/01418639308226404
Abstract
A generalized model to describe the evolution of surface topography during sputtering erosion by non-normally incident ion bombardment is presented. The lowest-order differential equations are sol ved for both a continuum description and a stochastic description of erosion and reveal the evolution of travelling-wave-like structures in both cases.Keywords
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