On the Distribution of Impurities in Epitaxial Silicon Films
- 1 March 1964
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 3 (3) , 161-162
- https://doi.org/10.1143/jjap.3.161
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Epitaxial Silicon JunctionsJournal of the Electrochemical Society, 1963
- Impurity Distribution in Epitaxial Silicon FilmsJournal of the Electrochemical Society, 1962
- Anomalous Impurity Diffusion in Epitaxial Silicon near the SubstrateJournal of the Electrochemical Society, 1962