A thermopneumatically actuated microvalve for liquid expansion and proportional control
- 22 November 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Silicon Microvalves For Gas Flow ControlPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Silicon fusion bonding for fabrication of sensors, actuators and microstructuresSensors and Actuators A: Physical, 1990
- Field Assisted Glass-Metal SealingJournal of Applied Physics, 1969