Dependence of Crystalline Structure and Lattice Parameters on Film Thickness in PbTiO3/Pt/MgO Epitaxial Structure

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Abstract
In PbTiO3 (2.2–398 nm in thickness)/Pt/MgO(100) structure, the dependence of the crystalline structure and lattice parameters of PbTiO3 thin films on the film thickness was investigated using the θ-2θ XRD method and the energy dispersive typed total reflection X-ray diffraction method (ED-TXRD). By using the ED-TXRD method, we can easily evaluate the in-plane structure of island-structured PbTiO3 films at the initial growth stage. Although the PbTiO3 thin films were highly c-axis orientated, the formation of some a-domains was observed with increasing thickness. The lattice parameters of the vertical dimension were dependent on the film thickness, unlike those in-plane. From these experimental results, the inner strain occurring in PbTiO3 thin films is discussed.