Stress analysis of SiO2/Si bi-metal effect in silicon accelerometers and its compensation
- 31 July 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 34 (1) , 43-49
- https://doi.org/10.1016/0924-4247(92)80138-s
Abstract
No abstract availableKeywords
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