Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 316-319
- https://doi.org/10.1016/0924-4247(90)85063-a
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A high performance, variable capacitance accelerometerIEEE Transactions on Instrumentation and Measurement, 1988