A high performance, variable capacitance accelerometer
- 1 January 1988
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Instrumentation and Measurement
- Vol. 37 (4) , 569-571
- https://doi.org/10.1109/19.9815
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Three-dimensional structuring of silicon for sensor applicationsSensors and Actuators, 1983
- A micromechanical capacitive accelerometer with a two-point inertial-mass suspensionSensors and Actuators, 1983
- A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivityIEEE Transactions on Electron Devices, 1982
- Squeeze Film Dampers: Amplitude Effects at Low Squeeze NumbersJournal of Engineering for Industry, 1975
- Low-Temperature Electrostatic Silicon-to-Silicon Seals Using Sputtered Borosilicate GlassJournal of the Electrochemical Society, 1972
- Field Assisted Glass-Metal SealingJournal of Applied Physics, 1969