Three-dimensional structuring of silicon for sensor applications
- 31 December 1983
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 4, 455-463
- https://doi.org/10.1016/0250-6874(83)85057-4
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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- Vertical Etching of Silicon at very High Aspect RatiosAnnual Review of Materials Science, 1979
- The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water SolutionsJournal of the Electrochemical Society, 1979
- Dynamic micromechanics on silicon: Techniques and devicesIEEE Transactions on Electron Devices, 1978
- Anisotropic etching of siliconIEEE Transactions on Electron Devices, 1978